12-inch Compatible
Large-area Hot-Filament CVD System
- Two-stage automatic recipe operation (Seeding → Film growth)
- Equipped with an automatic filament tension adjustment mechanism
- Reduced tension stabilization time: Approx. 5 minutes (during the carbonization process)
- Capable of long-term unattended operation
- Equipped with various interlocks (water flow rate, gas pressure)
- Full-circumference water-cooling mechanism for the chamber
- Supports applications from R&D to mass production
◆Diamond Thin Film
Chemical stability, high thermal conductivity, and excellent semiconductor physical properties.
◆Applications
Electrochemical electrodes, heat dissipation substrates, contact layers for radiation-resistant devices, etc.
Diamond Synthesis Process via Hot-Filament CVD
A mixed gas of methane and hydrogen is decomposed by an electrically heated tungsten filament. The precursors then undergo crystal growth on the substrate surface to synthesize a diamond thin film.
By adding a boron source (trimethylboron) to the gas, it is also possible to synthesize boron-doped conductive diamond thin films.
S.Ohmagari Functional Diamond (2023)
